Electron-beam writing of photonic crystal patterns using a large beam-spot diameter
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 2003
ISSN: 0957-4484,1361-6528
DOI: 10.1088/0957-4484/14/9/313